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Low load,UHV ( Ultra High Purity ) UHV ( Ultra High
Vacuum) Seals
Helicoflex Delta Seal은 일반 씰로는 불가능한 초저온,초고순도,초진공과
같은 극한의 사용환경에 적합한 씰로써, 내화학성,내방사능성이 뛰어나,유독성가스/케미칼의
이송시스템, 반도체분야의 PVD / CVD / ETCH TOOL,가속기,핵융합장치등과
같이 Leak를 완벽하게 차단(Ultra-low Leak Rate)해야되는 플랜지나 커넥터와
같은 연결부품에 많이 적용되어 왔으며, 특히 낮은
체결력(Low compression load)이 요구되는, Quartz,Ceramic,
Aluminum과 같은 깨지기 쉽거나 연질의 플랜지에 적합하도록 고안된 Helicoflex
Seal이다. |
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| 오링이외의
다양한 형상 Odd Shapes의 Delta Seal |
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Helicoflex Delta Seal의 특장점 |
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Ultra-low Leak Rates (
-cc/sec He)
Low
Outgassing
Cryogenic Temperatures (<
1.8°K)
Long
Life Expectancy |
Chemical
Compatability
Aluminum Flanges
Odd
Shapes Sizes
High
Temperature Bake Out |
Radiation
Resistance
Remote
Handling Capability
Quartz & Ceramic Flanges
Reduced
Load
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■ Helicoflex seal is a registered brand name of Technetics group.
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 Typical
Applications l 적용분야 |
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GAS
/ CHEMICAL DELIVERY SYSTEMS
유독성
개스/케미칼 이송라인
Modular Gas Systems: Surface Mount Components
Mass Flow Controllers: Inlet / Outlet Ports,
Sensor Ports
Flow Control Components: Valves, Regulators,
Transducers
Chemical Delivery Canisters / Ampoules
Bulk Chemical: Flange Connections
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PVD
/ CVD / ETCH TOOLS 반도체분야
Flange Connections: SStoSS, SS
to Al
UHV Pump / Chamber Connections
Gate / Slit Valves
Odd Shaped Chamber Ports
Standard ISO Flanges
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ACCELERATORS/FUSION
RESEARCH 핵융합
Quartz Windows / Ceramic Flanges
Tandem Seals: Metal and Elastomer
RF Waveguide Connections
Cryogenics / Superconducting
Magnets
Beam Tube Connections
Custom Vaccum Chambers
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원자력
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