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Low load,UHV ( Ultra High Purity ) UHV ( Ultra High Vacuum) Seals
Helicoflex Delta SealÀº ÀÏ¹Ý ¾Á·Î´Â ºÒ°¡´ÉÇÑ ÃÊÀú¿Â,ÃÊ°í¼øµµ,ÃÊÁø°ø°ú °°Àº ±ØÇÑÀÇ »ç¿ëȯ°æ¿¡ ÀûÇÕÇÑ ¾Á·Î½á, ³»È­Çмº,³»¹æ»ç´É¼ºÀÌ ¶Ù¾î³ª,À¯µ¶¼º°¡½º/ÄɹÌÄ®ÀÇ À̼۽ýºÅÛ, ¹ÝµµÃ¼ºÐ¾ßÀÇ PVD / CVD / ETCH TOOL,°¡¼Ó±â,ÇÙÀ¶ÇÕÀåÄ¡µî°ú °°ÀÌ Leak¸¦ ¿Ïº®ÇÏ°Ô Â÷´Ü(Ultra-low Leak Rate)ÇؾߵǴ Ç÷£Áö³ª Ä¿³ØÅÍ¿Í °°Àº ¿¬°áºÎÇ°¿¡ ¸¹ÀÌ Àû¿ëµÇ¾î ¿ÔÀ¸¸ç, ƯÈ÷ ³·Àº ü°á·Â(Low compression load)ÀÌ ¿ä±¸µÇ´Â, Quartz,Ceramic, Aluminum°ú °°Àº ±úÁö±â ½±°Å³ª ¿¬ÁúÀÇ Ç÷£Áö¿¡ ÀûÇÕÇϵµ·Ï °í¾ÈµÈ Helicoflex SealÀÌ´Ù.
¿À¸µÀÌ¿ÜÀÇ ´Ù¾çÇÑ Çü»ó Odd ShapesÀÇ Delta Seal
Helicoflex Delta SealÀÇ Æ¯ÀåÁ¡  
Ultra-low Leak Rates (


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cc/sec He)


Low Outgassing


Cryogenic Temperatures (< 1.8¡ÆK)


Long Life Expectancy
Chemical Compatability


Aluminum Flanges


Odd Shapes Sizes


High Temperature Bake Out
Radiation Resistance


Remote Handling Capability


Quartz & Ceramic Flanges


Reduced Load
--------------

¡á Helicoflex seal is a registered brand name of Technetics group.
Typical Applications l Àû¿ëºÐ¾ß
GAS / CHEMICAL DELIVERY SYSTEMS À¯µ¶¼º °³½º/ÄɹÌÄ® À̼۶óÀÎ


Modular Gas Systems: Surface Mount Components


Mass Flow Controllers: Inlet / Outlet Ports, Sensor Ports


Flow Control Components: Valves, Regulators, Transducers


Chemical Delivery Canisters / Ampoules


Bulk Chemical: Flange Connections


PVD / CVD / ETCH TOOLS ¹ÝµµÃ¼ºÐ¾ß


Flange Connections: SStoSS, SS to Al


UHV Pump / Chamber Connections


Gate / Slit Valves


Odd Shaped Chamber Ports


Standard ISO Flanges




ACCELERATORS/FUSION RESEARCH ÇÙÀ¶ÇÕ


Quartz Windows / Ceramic Flanges


Tandem Seals: Metal and Elastomer


RF Waveguide Connections


Cryogenics / Superconducting Magnets


Beam Tube Connections


Custom Vaccum Chambers

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Tel : 070-4027-4882      Fax : 070-4027-4885      Email : sales @anyseal.co.kr