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Low load,UHV ( Ultra High Purity ) UHV ( Ultra High
Vacuum) Seals
Helicoflex Delta SealÀº ÀÏ¹Ý ¾Á·Î´Â ºÒ°¡´ÉÇÑ ÃÊÀú¿Â,ÃÊ°í¼øµµ,ÃÊÁø°ø°ú
°°Àº ±ØÇÑÀÇ »ç¿ëȯ°æ¿¡ ÀûÇÕÇÑ ¾Á·Î½á, ³»ÈÇмº,³»¹æ»ç´É¼ºÀÌ ¶Ù¾î³ª,À¯µ¶¼º°¡½º/ÄɹÌÄ®ÀÇ
À̼۽ýºÅÛ, ¹ÝµµÃ¼ºÐ¾ßÀÇ PVD / CVD / ETCH TOOL,°¡¼Ó±â,ÇÙÀ¶ÇÕÀåÄ¡µî°ú
°°ÀÌ Leak¸¦ ¿Ïº®ÇÏ°Ô Â÷´Ü(Ultra-low Leak Rate)ÇؾߵǴ Ç÷£Áö³ª Ä¿³ØÅÍ¿Í
°°Àº ¿¬°áºÎÇ°¿¡ ¸¹ÀÌ Àû¿ëµÇ¾î ¿ÔÀ¸¸ç, ƯÈ÷ ³·Àº
ü°á·Â(Low compression load)ÀÌ ¿ä±¸µÇ´Â, Quartz,Ceramic,
Aluminum°ú °°Àº ±úÁö±â ½±°Å³ª ¿¬ÁúÀÇ Ç÷£Áö¿¡ ÀûÇÕÇϵµ·Ï °í¾ÈµÈ Helicoflex
SealÀÌ´Ù. |
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¿À¸µÀÌ¿ÜÀÇ
´Ù¾çÇÑ Çü»ó Odd ShapesÀÇ Delta Seal |
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Helicoflex Delta SealÀÇ Æ¯ÀåÁ¡ |
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Ultra-low Leak Rates (
-cc/sec He)
Low
Outgassing
Cryogenic Temperatures (<
1.8¡ÆK)
Long
Life Expectancy |
Chemical
Compatability
Aluminum Flanges
Odd
Shapes Sizes
High
Temperature Bake Out |
Radiation
Resistance
Remote
Handling Capability
Quartz & Ceramic Flanges
Reduced
Load
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¡á Helicoflex seal is a registered brand name of Technetics group.
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Typical
Applications l Àû¿ëºÐ¾ß |
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GAS
/ CHEMICAL DELIVERY SYSTEMS
À¯µ¶¼º
°³½º/ÄɹÌÄ® À̼۶óÀÎ
Modular Gas Systems: Surface Mount Components
Mass Flow Controllers: Inlet / Outlet Ports,
Sensor Ports
Flow Control Components: Valves, Regulators,
Transducers
Chemical Delivery Canisters / Ampoules
Bulk Chemical: Flange Connections
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PVD
/ CVD / ETCH TOOLS ¹ÝµµÃ¼ºÐ¾ß
Flange Connections: SStoSS, SS
to Al
UHV Pump / Chamber Connections
Gate / Slit Valves
Odd Shaped Chamber Ports
Standard ISO Flanges
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ACCELERATORS/FUSION
RESEARCH ÇÙÀ¶ÇÕ
Quartz Windows / Ceramic Flanges
Tandem Seals: Metal and Elastomer
RF Waveguide Connections
Cryogenics / Superconducting
Magnets
Beam Tube Connections
Custom Vaccum Chambers
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