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Garlock Helicoflex의 Ultra-Flex Seal은 금속 재질의 씰로써, 아주 낮은
체결력( Low Compression load)에도 고진공이 가능한 초고성능씰이다 . 초고순도,내화학성이
뛰어나 반도체분야에서는 KALREZ,Perlast,Chemraz 와 같은 퍼플러오링을 효과적으로
대체할수 있을 뿐만 아니라 , 성능은 오히려 훨씬 뛰어나다. |
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Garlock Ultra-Flex Seal의
특장점 |
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Replacement For Perfluoroelastomer[Kalrez,Perlast,Chemraz]O-Rings
Designed for semiconductor, high purity, tight sealing
applications.
Tighter seal & Sealing Level : <
1x10-9 cc/sec He,온도 영향 별로 없음.
Kalrez,Viton등 Elastomer Oring의 sealing Level : 
온도가 올라갈수록 저하됨.
High Purity, No contamination.Equipment sealing
surfaces stay clean 초고순도,오염제로.
90% lower load than standard metal seals,Ceramic,Quartz
같이 깨지기쉬운 연질의 플랜지에 적합.
Compatible with aggressive semiconductor media
including plasmas.
Good for applications from cryogenics(극저온) up
to 350°C, · No out-gassing. |
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Turbo pumps
Chemical containers
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Quartz windows
Ceramic flanges
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Vacuum chambers
Quick disconnect flanges |
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 ISO
KF 16, 25, 40 & 50 standard metal replacement
assemblies.ISO LF flanges.
아래의
KALREZ, Chemraz와 같은 퍼플러와 Ultra-Flex Seal의
성능비교를 보십시요. |
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ULTRA-FLEX
Seal vs. Perfluoro (FFKM) 성능비교 |
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ULTRA-FLEX 200,400
와 FFKM(퍼플러)의 Temperature별 Leakage비교 |
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LEAKAGE
vs. TIME FFKM(Perfluoro) vs. ULTRA-FLEX |
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반도체
분야의 적용 |
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Wet
Applications (Lithography, Etch Stripping,Cleaning)
Drain seals
Seals for chemical containers
Seals for filters/connectors
Dry
Plasma (Etching, Ashing, PECVD/APCVD),
Dry Gas (PVD, Metal CVD)
Chamber lid
Lamp seal
Exhaust valve
Gas inlet/outlet
Window seal
Centering ring
Fittings/connectors
Dry
Thermal (LPCVD, Lamp Anneal, Oxidization Diffusion)
Quartz chamber seal
Fittings
Centering ring
CVD and PVD Technologies
RTP System Deposition Technologies
☞
Click PDF Catalogue  |
CVD and PVD Technologies
RTP System
Deposition Technologies
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반도체에서의
적용분야
